Optimized Design of Microresonators Using Genetic Algorithm
نویسندگان
چکیده
Sensors & Transducers Journal (ISSN 1726-5479) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA). Available in electronic and CD-ROM. Abstract: This paper represents the optimization of micro resonator design using Genetic Algorithm. Optimized physical layout parameters are generated using genetic algorithm. Optimization evaluates parameter by minimizing active device area, electrostatic drive voltage or a weighted combination of area and drive voltage or by maximizing displacement at resonance. Desired resonant frequency and mode frequency separations are governed by the objective function. Layouts are generated for optimized design parameters using Coventorware. Modal analysis is performed and it is compared with the designed resonant frequency.
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